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Fabrication of a silicon-Pyrex-silicon stack by a.c. anodic bonding
M. Despont, H. Gross, F. Arrouy, C. Stebler, U. StauferVolume:
55
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)80081-7
File:
PDF, 493 KB
english, 1996