Maskless etching of three-dimensional silicon structures in...

Maskless etching of three-dimensional silicon structures in KOH

Xinxin Li, Minhang Bao, Shaoqun Shen
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Volume:
57
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)80094-5
File:
PDF, 673 KB
english, 1996
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