A production process of silicon sensor elements for a fibre-optic pressure sensor
Carola Strandman, Leif Smith, Lars Tenerz, Bertil HökVolume:
63
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)80430-x
File:
PDF, 551 KB
english, 1997