![](/img/cover-not-exists.png)
A novel micromachining technology for multilevel structures of silicon
Minhang Bao, Xinxin Li, Shaoqun Shen, Hong ChenVolume:
63
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)80508-0
File:
PDF, 978 KB
english, 1997