A novel micromachining technology for multilevel structures...

A novel micromachining technology for multilevel structures of silicon

Minhang Bao, Xinxin Li, Shaoqun Shen, Hong Chen
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Volume:
63
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)80508-0
File:
PDF, 978 KB
english, 1997
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