Micromachined vibration sensor with on-chip circuitry and optical interconnects
E. Peiner, K. Fricke, D. Fehly, A. Schlachetzki, P. HauptmannVolume:
68
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(98)00013-2
File:
PDF, 907 KB
english, 1998