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Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers
J.A. Plaza, J. Esteve, E. Lora-TamayoVolume:
68
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00022-3
File:
PDF, 419 KB
english, 1998