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Wafer-to-wafer fusion bonding of oxidized silicon to silicon at low temperatures
A. Berthold, B. Jakoby, M.J. VellekoopVolume:
68
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00028-4
File:
PDF, 382 KB
english, 1998