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Silicon ic process compatible thin metal film post-processing module
Davey Wijngaards, Marian Bartek, Reinoud F. WolffenbuttelVolume:
68
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(98)00051-x
File:
PDF, 1.25 MB
english, 1998