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Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon
John H. Comtois, M. Adrian Michalicek, Carole Craig BarronVolume:
70
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(98)00108-3
File:
PDF, 1.09 MB
english, 1998