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Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
Kazuo Sato, Tetsuo Yoshioka, Taeko Ando, Mitsuhiro Shikida, Tatsuo KawabataVolume:
70
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(98)00125-3
File:
PDF, 590 KB
english, 1998