Modeling, design and testing of the electrostatic shuffle...

Sensors and Actuators A: Physical 1998 Vol. 70; Iss. 1-2

Modeling, design and testing of the electrostatic shuffle motor

Niels Tas, Jeroen Wissink, Louis Sander, Theo Lammerink, Miko Elwenspoek
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Volume:
70
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(98)00129-0
File:
PDF, 952 KB
english, 1998
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