Silicon-to-silicon wafer bonding using evaporated glass

Sensors and Actuators A: Physical 1998 Vol. 70; Iss. 1-2

Silicon-to-silicon wafer bonding using evaporated glass

Steen Weichel, Roger de Reus, Michael Lindahl
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Volume:
70
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(98)00130-7
File:
PDF, 868 KB
english, 1998
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