Low-cost PDMS seal ring for single-side wet etching of MEMS...

Sensors and Actuators A: Physical 1998 Vol. 70; Iss. 1-2

Low-cost PDMS seal ring for single-side wet etching of MEMS structures

J. Brugger, G. Beljakovic, M. Despont, H. Biebuyck, N.F. de Rooij, P. Vettiger
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Volume:
70
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(98)00132-0
File:
PDF, 555 KB
english, 1998
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