Silicon anisotropic etching in alkaline solutions I. The...

Silicon anisotropic etching in alkaline solutions I. The geometric description of figures developed under etching Si(100) in various solutions

Irena Zubel, Irena Barycka
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Volume:
70
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(98)00141-1
File:
PDF, 732 KB
english, 1998
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