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Silicon anisotropic etching in alkaline solutions I. The geometric description of figures developed under etching Si(100) in various solutions
Irena Zubel, Irena BaryckaVolume:
70
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(98)00141-1
File:
PDF, 732 KB
english, 1998