A micromachined piezoresistive angular rate sensor with a composite beam structure
Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Deren LuVolume:
72
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(98)00220-9
File:
PDF, 501 KB
english, 1999