A CMOS-compatible device for fluid density measurements...

Sensors and Actuators A: Physical 1999 Vol. 73; Iss. 3

A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching

David Westberg, Oliver Paul, Gert I. Andersson, Henry Baltes
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Volume:
73
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(98)00225-8
File:
PDF, 2.17 MB
english, 1999
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