Novel C-MOS compatible monolithic silicon gas flow sensor...

Sensors and Actuators A: Physical 1999 Vol. 76; Iss. 1-3

Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation

G Kaltsas, A.G Nassiopoulou
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Volume:
76
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(98)00370-7
File:
PDF, 937 KB
english, 1999
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