A micromachined actuator for nanopositioning in two...

Sensors and Actuators A: Physical 1999 Vol. 76; Iss. 1-3

A micromachined actuator for nanopositioning in two dimensions

F Ayela, J Chaussy, T Fournier, E Menegaz
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Volume:
76
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(99)00010-2
File:
PDF, 663 KB
english, 1999
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