Rapid prototyping of micromechanical devices using a...

Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling

S. Dauer, A. Ehlert, S. Büttgenbach
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Volume:
76
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(99)00029-1
File:
PDF, 1.96 MB
english, 1999
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