Study of the mass sensitivity of SH-APM sensors with Maple...

Sensors and Actuators A: Physical 1999 Vol. 76; Iss. 1-3

Study of the mass sensitivity of SH-APM sensors with Maple V

Irène Esteban, Corinne Déjous, Dominique Rebière, Jacques Pistré, Roger Planade
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Volume:
76
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(99)00031-x
File:
PDF, 396 KB
english, 1999
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