![](/img/cover-not-exists.png)
Fractures properties of InP microcantilevers by hetero-micromachining
K Fricke, E Peiner, M Chahoud, A SchlachetzkiVolume:
76
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(99)00038-2
File:
PDF, 1.41 MB
english, 1999