The empirical verification of the FEM model of...

Sensors and Actuators A: Physical 1999 Vol. 76; Iss. 1-3

The empirical verification of the FEM model of semiconductor pressure sensor

Tomasz Pancewicz, Ryszard Jachowicz, Zenon Gniazdowski, Zbigniew Ażgin, Paweł Kowalski
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Volume:
76
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(99)00047-3
File:
PDF, 999 KB
english, 1999
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