![](/img/cover-not-exists.png)
First integrated inductive proximity sensor with on-chip CMOS readout circuit and electrodeposited 1 mm flat coil
Ph.A. Passeraub, P.-A. Besse, A. Bayadroun, S. Hediger, E. Bernasconi, R.S. PopovicVolume:
76
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(99)00049-7
File:
PDF, 1.44 MB
english, 1999