![](/img/cover-not-exists.png)
A micromachined pressure/flow-sensor
R.E. Oosterbroek, T.S.J. Lammerink, J.W. Berenschot, G.J.M. Krijnen, M.C. Elwenspoek, A. van den BergVolume:
77
Year:
1999
Language:
english
Pages:
11
DOI:
10.1016/s0924-4247(99)00188-0
File:
PDF, 464 KB
english, 1999