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A electrostatic micromechanical switch for logic operation in multichip modules on Si
Akihiko Hirata, Katsuyuki Machida, Hakaru Kyuragi, Masahiko MaedaVolume:
80
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(99)00256-3
File:
PDF, 1.16 MB
english, 2000