Differences in anisotropic etching properties of KOH and...

Sensors and Actuators A: Physical 2000 Vol. 80; Iss. 2

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro, Daisuke Uchikawa
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Volume:
80
Year:
2000
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(99)00264-2
File:
PDF, 2.63 MB
english, 2000
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