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Factors enhancing the reliability of touch-mode electrostatic actuators
C. Cabuz, E.I. Cabuz, T.R. Ohnstein, J. Neus, R. MaboudianVolume:
79
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(99)00281-2
File:
PDF, 999 KB
english, 2000