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Depth and profile control in plasma etched MEMS structures
J. Kiihamäki, H. Kattelus, J. Karttunen, S. FranssilaVolume:
82
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(99)00336-2
File:
PDF, 1.68 MB
english, 2000