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Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Roya Maboudian, W.Robert Ashurst, Carlo CarraroVolume:
82
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(99)00337-4
File:
PDF, 130 KB
english, 2000