Simulation and fabrication of piezoresistive membrane type...

Sensors and Actuators A: Physical 2000 Vol. 80; Iss. 3

Simulation and fabrication of piezoresistive membrane type MEMS strain sensors

Li Cao, Tae Song Kim, Susan C. Mantell, Dennis L. Polla
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Volume:
80
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(99)00343-x
File:
PDF, 476 KB
english, 2000
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