A new wide-dimensional freestanding microstructure fabrication technology using laterally formed porous silicon as a sacrificial layer
Choon-Sup Lee, Jae-Duk Lee, Chul-Hi HanVolume:
84
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(99)00351-9
File:
PDF, 1.36 MB
english, 2000