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New wafer-scale fabrication method for stacked optical waveguide interconnects and 3D micro-optic structures using photoresponsive (inorganic–organic hybrid) polymers
U Streppel, P Dannberg, C Wächter, A Bräuer, L Fröhlich, R Houbertz, M PopallVolume:
21
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0925-3467(02)00186-6
File:
PDF, 430 KB
english, 2003