Growth mechanism of α-SiC hetero-epitaxial films by PLD as...

Growth mechanism of α-SiC hetero-epitaxial films by PLD as studied on the laser photon, pulse-width and substrates dependence

Hachizo Muto, Shin-ichiro Kamiya, Takeshi Kusumori
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Volume:
23
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0925-3467(03)00057-0
File:
PDF, 135 KB
english, 2003
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