Epitaxial growth and microstructure of cubic SiC films on Si substrates
Hujun Jia, Yintang Yang, Changchun Chai, Yuejin Li, Zuoyun ZhuVolume:
23
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0925-3467(03)00058-2
File:
PDF, 209 KB
english, 2003