![](/img/cover-not-exists.png)
Influence of argon gas pressure on the crystallinity of α-SiC epitaxial films fabricated by Nd:YAG pulsed-laser deposition
Takeshi Kusumori, Hachizo MutoVolume:
23
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0925-3467(03)00059-4
File:
PDF, 161 KB
english, 2003