Study of plasma etching of β-SiC thin films grown on...

Optical Materials 2003 Vol. 23; Iss. 1-2

Study of plasma etching of β-SiC thin films grown on Si-substrate

Changchun Chai, Yintang Yang, Yuejin Li, Hujun Jia
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Volume:
23
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0925-3467(03)00068-5
File:
PDF, 134 KB
english, 2003
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