Vapor deposition polymerization and reactive ion beam...

Optical Materials 1999 Vol. 12; Iss. 2-3

Vapor deposition polymerization and reactive ion beam etching of poly(p-xylylene) films for waveguide applications

Bernard Ratier, Yong Seok Jeong, André Moliton, Pierre Audebert
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Volume:
12
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0925-3467(99)00035-x
File:
PDF, 119 KB
english, 1999
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