Superior Stability of Ultrathin and Nanocrystalline TiZrN...

Nanoscience and Nanotechnology Letters 2009 / 03 Vol. 1; Iss. 1

Superior Stability of Ultrathin and Nanocrystalline TiZrN Films as Diffusion Barriers for Cu Metallization

Kuo, Yu-Lin, Kung, Fu-Chen, Su, Te-Li
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Volume:
1
Language:
english
Journal:
Nanoscience and Nanotechnology Letters
DOI:
10.1166/nnl.2009.1010
Date:
March, 2009
File:
PDF, 2.94 MB
english, 2009
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