Hydrophobic valves of plasma deposited...

Sensors and Actuators B: Chemical 2001 Vol. 75; Iss. 1-2

Hydrophobic valves of plasma deposited octafluorocyclobutane in DRIE channels

Helene Andersson, Wouter van der Wijngaart, Patrick Griss, Frank Niklaus, Göran Stemme
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Volume:
75
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0925-4005(00)00675-4
File:
PDF, 200 KB
english, 2001
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