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Fabrication and gas sensing properties of α-Fe2O3 thin film prepared by plasma enhanced chemical vapor deposition (PECVD)
Eun-Tae Lee, Gun-Eik Jang, Chang Kyo Kim, Dae-Ho YoonVolume:
77
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0925-4005(01)00716-x
File:
PDF, 311 KB
english, 2001