Atomic-layer chemical vapor deposition of SnO2 for...

Atomic-layer chemical vapor deposition of SnO2 for gas-sensing applications

A Rosental, A Tarre, A Gerst, T Uustare, V Sammelselg
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Volume:
77
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0925-4005(01)00746-8
File:
PDF, 151 KB
english, 2001
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