Investigation of stability and reliability of tin oxide...

Sensors and Actuators B: Chemical 2001 Vol. 81; Iss. 1

Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices

Rajnish K. Sharma, Philip C.H. Chan, Zhenan Tang, Guizhen Yan, I-Ming Hsing, Johnny K.O. Sin
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Volume:
81
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0925-4005(01)00920-0
File:
PDF, 708 KB
english, 2001
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