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Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach
Roald M Tiggelaar, Theo T Veenstra, Remco G.P Sanders, Erwin Berenschot, Han Gardeniers, Miko Elwenspoek, Albert Prak, Richard Mateman, Jeroen M Wissink, Albert van den BergVolume:
92
Year:
2003
Language:
english
Pages:
12
DOI:
10.1016/s0925-4005(03)00127-8
File:
PDF, 460 KB
english, 2003