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Investigations on temperature controlled monolithic integrated surface acoustic wave (SAW) gas sensors
S. Bender, F.L. Dickert, W. Mokwa, P. PachatzVolume:
93
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0925-4005(03)00194-1
File:
PDF, 272 KB
english, 2003