A silicon micromachined conductometric gas sensor with a...

Sensors and Actuators B: Chemical 1996 Vol. 36; Iss. 1-3

A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD

Sanjeev Majoo, J.L. Gland, K.D. Wise, J.W. Schwank
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Volume:
36
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/s0925-4005(97)80088-3
File:
PDF, 1.70 MB
english, 1996
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