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Resistance measurements of platinum-titania thin film gas detectors in ultra-high vacuum (UHV) and reactive ion etcher (RIE) systems
R.M. Walton, H. Liu, J.L. Gland, J.W. SchwankVolume:
41
Year:
1997
Language:
english
Pages:
9
DOI:
10.1016/s0925-4005(97)80287-0
File:
PDF, 1.04 MB
english, 1997