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MOS structure (Pd-SiO2-Si) based gas sensor with an external catalyst element
V.I. Filippov, A.A. Terentjev, S.S. YakimovVolume:
41
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0925-4005(97)80288-2
File:
PDF, 635 KB
english, 1997