A low-power CMOS compatible integrated gas sensor using...

Sensors and Actuators B: Chemical 1998 Vol. 49; Iss. 1-2

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Lie-yi Sheng, Zhenan Tang, Jian Wu, Philip C.H. Chan, Johnny K.O. Sin
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Volume:
49
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0925-4005(98)00092-6
File:
PDF, 546 KB
english, 1998
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