Oxygen flow effect on gas sensitivity properties of tin...

Oxygen flow effect on gas sensitivity properties of tin oxide film prepared by r.f. sputtering

Vladimir V. Kissine, Sergei A. Voroshilov, Victor V. Sysoev
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Volume:
55
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0925-4005(99)00022-2
File:
PDF, 115 KB
english, 1999
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