Anisotropic etching of silicon in a complexant redox...

Anisotropic etching of silicon in a complexant redox alkaline system

Carmen Moldovan, Rodica Iosub, Dan Dascalu, Gheorghe Nechifor
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Volume:
58
Year:
1999
Language:
english
Pages:
12
DOI:
10.1016/s0925-4005(99)00124-0
File:
PDF, 1.07 MB
english, 1999
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